Voltage Specifications1, 2,
| Source | Measure3 |
| Range4 | Resolution | Accuracy5 23 °C ± 5 °C,
1 Year ±(% setting + volts) | Noise (RMS)<10 Hz | Resolution | Input Resistance | Accuracy 23 °C ± 5 °C,
1 Year ±(% reading + volts) |
| 200.0000 mV | 5 µV | 0.015% + 200 µV | 2 µV | 100 nV | > 10 GΩ | 0.012% + 200 µV |
| 2.000000 V | 50 µV | 0.020% + 300 µV | 10 µV | 1 µV | > 10 GΩ | 0.012% + 300 µV |
| 20.00000 V | 500 µV | 0.015% + 2.4 mV | 100 µV | 10 µV | > 10 GΩ | 0.015% + 1 mV |
| 200.0000 V | 5 mV | 0.015% + 24 mV | 1 mV | 100 µV | > 10 GΩ | 0.015% + 10 mV |
| 1000.000 V | 50 mV | 0.02% + 100 mV | 20 mV | 10 mV | > 10 GΩ | 0.015% + 50 mV |
Temperature Coefficient 20 V and 1000 V ranges: ± (0.15 × accuracy specification)/°C, 0 °C to 18 °C and 28 °C to 50 °C
200 mV and 2 V ranges: ±(0.30 x accuracy specification)/°C, 0 °C to 18 °C and 28 °C to 50 °C
Current Specifications1, 2
| Source | Measure3 |
| Range4 | Resolution | Accuracy523 °C ± 5 °C,
1 Year ±(% setting + amps) | Noise (RMS)<10 Hz | Resolution | Voltage Burden | Accuracy23 °C ± 5 °C,
1 Year ±(% reading + amps) |
| 10.00000 nA6 | 500 fA | 0.100% + 200 pA | 500 fA | 10 fA | <100 µV | 0.10% + 250 pA |
| 100.0000 nA6 | 5 pA | 0.060% + 250 pA | 500 fA | 100 fA | <100 µV | 0.060% + 300 pA |
| 1.000000 μA | 50 pA | 0.025% + 400 pA | 5 pA | 1 pA | < 100 µV | 0.025% + 300 pA |
| 10.00000 μA | 500 pA | 0.025% + 1.5 nA | 40 pA | 10 pA | <100 µV | 0.025% + 700 pA |
| 100.0000 μA | 5 nA | 0.020% + 15 nA | 400 pA | 100 pA | <100 µV | 0.02% + 6 nA |
| 1.000000 mA | 50 nA | 0.020% + 150 nA | 5 nA | 1 nA | <100 µV | 0.02% + 60 nA |
| 10.00000 mA | 500 nA | 0.020% + 1.5 μA | 40 nA | 10 nA | <100 µV | 0.02% + 600 nA |
| 100.0000 mA | 5 μA | 0.025% + 15 μA | 100 nA | 100 nA | <100 µV | 0.025% + 6 μA |
| 1.000000 A | 50 μA | 0.067% + 900 μA | 10 μA | 1 μA | <100 µV | 0.03% + 500 μA |
Temperature Coefficient ± (0.15 × accuracy specification)/°C, 0 °C to 18 °C and 28 °C to 50 °C
Notes
1. Speed = 1 PLC.
2. All specifications are guaranteed with output ON.
3. Accuracies apply to 2-wire and 4-wire modes when properly zeroed. For the 200 mV and 1 A ranges, the voltage burden may exceed the specification in 2-wire mode.
4. Maximum display and programming ranges are 5% overrange for voltage, except for the 1000 V range, which is 10% overrange (1100 V), and 5% overrange for current (for example,1.05 A on the 1 A range).
5. For sink mode, 1 µA to 100 mA range, accuracy is ±(0.5% + offset × 3). For 1 A range, accuracy ± (0.15% x accuracy specification))/°C on 20 V and 1000 V ranges ±(1.5% + offset × 3) .
6. Rear-panel triaxial connections only
Resistance Measurement Accuracy (Local Or Remote Sense)7, 8, 9
| Range | Default Resolution10 | Default Test Current | Normal Accuracy 23 °C ± 5 °C,
1 Year ± (% reading + ohms) | Enhanced Accuracy11 23 °C ± 5 °C,
1 Year ± (% reading + ohms) |
| < 2.000000 Ω12 | 1 µΩ | User-defined | Source IACC+ Meas VACC | Meas IACC + Meas VACC |
| 20.00000 Ω | 10 µΩ | 100 mA | 0.098% + 0.003 Ω | 0.073% + 0.001 Ω |
| 200.0000 Ω | 100 µΩ | 10 mA | 0.077% + 0.03 Ω | 0.053% + 0.01 Ω |
| 2.000000 kΩ | 1 mΩ | 1 mA | 0.066% + 0.3 Ω | 0.045% + 0.1 Ω |
| 20.00000 kΩ | 10 mΩ | 100 µA | 0.063% + 3 Ω | 0.043% + 1 Ω |
| 200.0000 kΩ | 100 mΩ | 10 µA | 0.065% + 30 Ω | 0.046% + 10 Ω |
| 2.000000 MΩ | 1 Ω | 1 µA | 0.11% + 300 Ω | 0.049% + 100 Ω |
| 20.00000 MΩ | 10 Ω | 1 µA | 0.11% + 1 kΩ | 0.052% + 500 Ω |
| 200.0000 MΩ 13 | 100 Ω | 100 nA | 0.655% + 10 kΩ | 0.349% + 5 kΩ |
| >200.0000 MΩ12, 13 | - | User-defined | Source IACC+ Meas VACC | Meas IACC+ Meas VACC |
| Temperature Coefficient | ± (0.15 × accuracy specification)/°C 0 °C to 18 °C and 28 °C to 50 °C |
| Source Current, Measure Resistance Mode | Total uncertainty = I source accuracy + V measure accuracy (4-wire remote sense) |
| Source Voltage, Measure Resistance Mode | Total uncertainty = V source accuracy + I measure accuracy (4-wire remote sense) |
| Guard Output Impedance | ≥ 300 Ω typical |
Notes
7. Speed = 1 PLC.
8. All specifications are guaranteed with output ON.
9. Accuracies apply to 2-wire and 4-wire modes when properly zeroed.
10. Measure resolution 6.5 digits.
11. Source readback enabled; offset compensation on.
12. Source current, measure resistance or source voltage, measure resistance only.
13. Rear-panel triaxial connections only.
Supplemental Specifications
| Overrange | 105% of range for 200 mV to 200 V, source and measure ranges; 110% of range for 1000 V, source and measure ranges |
| Regulation |
|
| Voltage | Line: 0.01% of range
Load: 0.01% of range + 100 µV
|
| Current | Line: 0.01% of range
Load: 0.01% of range + 100 pA |
| Source Limits |
|
| Voltage Source Current Limit | Bipolar current limit set with a single value
Minimum value is 10% of range
|
| Current Source Voltage Limit | Bipolar voltage limit set with a single value
Minimum value is 10% of range |
| Voltage Limit/Current Limit Accuracy | Add 0.3% of range and ±0.02% of reading to base specification |
| Overshoot |
|
| Voltage Source | <0.1% typical
Step size = Full scale, resistive load, 20 V range, 10 mA current limit
|
| Current Source | <0.1% typical
Step size = Full scale, resistive load of 10 kΩ, 1 mA range, 20 V voltage limit |
| Range Change Overshoot | Overshoot into a fully resistive 100 kΩ load, 10 Hz to 20 MHz bandwidth, adjacent ranges: 250 mV typical |
| Output Settling Time | Time required to reach 0.1% of final value after command is processed and output slew: 20 V range,100 mA current limit: < 200 µs typical |
| Maximum Slew Rate14 | 0.2 V/µs, 200 V range, 100 mA limit into a 2 kΩ load (typical)
0.5 V/µs, 1000 V range, 10 mA limit into a 100 kΩ load (typical) |
| Overvoltage Protection | User-selectable values, 10% tolerance; factory default = none |
| Voltage Source Noise | 10 Hz to 20 MHz (RMS): 4 mV typical into a resistive load |
| Common Mode Voltage | 250 V DC |
| Common Mode Isolation | > 1 GΩ, < 1000 pF |
| Noise Rejection (typical) | NPLCNMRRCMRR0.01-60 dB0.1-60 dB160 dB100 dB* * Except lowest two current ranges ~90dB. |
| Load Impedance |
|
| Normal Mode | 20 nF typical
|
| High-Capacitance Mode | Stable into 1 μF typical (specification only valid for ranges ≥100 μA) |
| Maximum Voltage Drop Between Force and Sense Terminals | 5 V |
| Maximum Sense Lead Resistance | 1 MΩ for rated accuracy |
| Sense Input Impedance | > 10 GΩ |
| Guard Offset Voltage | < 300 µV typical |
Notes
14. High capacitance mode off.
System Measurement Speeds15
Reading rates (readings per second) typical for 60 Hz (50 Hz), script (TSP) programmed
| NPLC | Trigger Origin | Measure to Memory | Measure to GPIB | Measure to USB | Measure to LAN | Source Measure Sweep to Memory | Source measure sweep to GPIB | Source Measure Sweep to USB | Source Measure Sweep to LAN |
| 0.01 | Internal | 3150 (2800) | 2760 (2570) | 2825 (2570) | 2740 (2530) | 1710 (1620) | 1620 (1540) | 1630 (1540) | 1620 (1540) |
| 0.01 | External | 2170 (2050) | 2120 (2003) | 2170 (2010) | 2100 (1990) | 1670 (1590) | 1580 (1500) | 1590 (1510) | 1580 (1510) |
| 0.10 | Interna | 540 (460) | 530 (450) | 530 (450) | 530 (450) | 470 (410) | 460 (400) | 470 (400) | 470 (400) |
| 0.10 | External | 500 (430) | 490 (420) | 500 (425) | 480 (420) | 450 (400) | 460 (390) | 460 (390) | 410 (350) |
| 1.00 | Internal | 59 (49 | 58 (49) | 59 (49) | 59 (49) | 58 (48) | 58 (48) | 58 (48) | 57 (48) |
| 1.00 | External | 58 (48) | 57 (48) | 58 (48) | 58 (48) | 57 (48) | 57 (48) | 57 (48) | 55 (48) |
Reading rates (readings per second) typical for 60 Hz (50 Hz), SCPI programmed16
| NPLC | Trigger Origin | Measure to Memory | Measure to GPIB | Measure to USB | Measure to LAN | Source Measure Sweep to memory | Source Measure Sweep to GPIB | Source Measure Sweep to USB | Source Measure Sweep to LAN |
| 0.01 | Internal | 3040 (2800) | 3000 (2760) | 3000 (2760) | 3010 (2710) | 1710 (1630) | 1610 (1544) | 1440 (1380) | 1690 (1590) |
| 0.01 | External | 2320 (2165) | 2290 (2140) | 2340 (2150) | 2290 (2130) | 1680 (1590) | 1560 (1525) | 1410 (1360) | 1660 (1560) |
| 0.10 | Internal | 540 (460) | 540 (450) | 540 (460) | 540 (450) | 540 (410) | 470 (410) | 450 (390) | 470 (410) |
| 0.10 | External | 510 (440) | 510 (430) | 510 (440) | 510 (430) | 470 (400) | 470 (400) | 450 (390) | 470 (400) |
| 1.00 | Internal | 59 (49) | 59 (49) | 59 (49) | 59 (49) | 58 (48) | 58 (48) | 57 (48) | 58 (48) |
| 1.00 | External | 58 (49) | 58 (49) | 58 (49) | 58 (49) | 58 (49) | 58 (48) | 57 (47) | 58 (48) |
Notes
15. Reading rates applicable for voltage or current measurements, autozero off, autorange off, filter off, binary reading format, and source readback off.
16. SCPI programming mode.
General Characteristics (default mode unless specified)
| Factory Default Standard Power-Up | SCPI Mode |
| Source Output Modes | Fixed DC Level, Memory/Configuration List (mixed function), Stair (linear and log). |
| Memory Buffer | >5,000,000 readings with selected measured values and timestamp. |
| Real-Time Clock | Lithium battery backup (3 yr. + battery life). |
| Remote Interfaces | GPIBIEEE-488.1 compliant. Supports IEEE-488.2 common commands and status model topology.USB Device (rear panel, type B)2.0 Full Speed USBTMC.USB Host (front panel, type A)USB 2.0, support for flash drives, FAT32.EthernetRJ-45 (10/100BT). |
| Digital I/O Interface: | Lines6 Input/Output user defined for digital I/O or triggering.Connector9-pin female D.Input Signal Levels0.7 V (maximum logic low), 3.7 V (minimum logic high).Input Voltage Limits-0.25 V (Abs. minimum), +5.25 V (Abs. maximum).Maximum Source Current+2.0 mA @ >2.7 V (per pin).Maximum Sink Current-50 mA at 0.7 V (per pin, solid-state fuse protected)5V Power Supply PinLimited to 500 mA @ >4 V (solid-state fuse protected).HandlerUser definable Start of Test, End of Test, 4 category bits. |
| Programmability | SCPI or TSP command sets. |
| TSP Mode | Embedded Test Script Processor (TSP) accessible from any host interface. |
| IP Configuration | Static or DHCP. |
| Expansion Interface | The TSP-Link expansion interface allows TSP enabled instruments to trigger and communicate with each other. |
| LXI Compliance | 1.5 LXI Device Specification 2016. |
| Display | 5 inch capacitive touch, color TFT WVGA (800×480) with LED backlight. |
| Input Signal Connections | Front: Banana. Rear: High-voltage triaxia. |
| Interlock | Active High Input. |
| Cooling | Forced air, variable speed. |
| Over Temperature Protection | Internally sensed temperature overload puts unit in standby mode. |
| Power Supply | 100 V to 240 V RMS, 50–60 Hz (automatically detected at power up). |
| VA Rating | 190 volt-amps max. |
| Altitude | Maximum 2000 meters above sea level. |
| EMC | Conforms to European Union EMC Directive. |
| Safety | NRTL listed to UL61010-1 and UL61010-2-30. Conforms with European Union Low Voltage Directive. |
| Vibration | MIL-PRF-28800F Class 3 Random. |
| Warm-Up | 1 hour to rated accuracies. |
| Dimensions | With bumpers and handle: 106 mm high × 255 mm wide × 425 mm deep (4.18 in × 10.05 in × 16.75 in).
Without bumpers and handle: 88 mm high × 213 mm wide × 403 mm deep (3.46 in × 8.39 in × 15.87 in.) |
| Weight | With bumpers and handle: 4.54 kg (10 lb).
Without bumpers and handle: 4.08 kg (9.0 lb). |
| Environment | Operating: 0 °C to 50 °C, 70% relative humidity up to 35 °C; derate 3% relative humidity/°C, 35 °C to 50 °C.
Storage: -25 °C to 65 °C.
Pollution Category: 2 |